Techniques useful in fabricating semiconductor devices having su

Details Techniques useful in fabricating semiconductor devices having su Techniques useful in fabricating semiconductor devices having su

1987-10-20

1989-04-04

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 33, 437 90, 148DIG10, 148DIG117, 357 34, H01L 21205, H01L 2176, H01L 21265

Patent

active

048187135

ABSTRACT:
Submicron resolution in the fabrication of transistors is obtained by using sidewall techniques. The techniques described remove the sidewalls after oxidizing the materials between the sidewalls and the openings so formed by the removal are used as a mask for subsequent substrate modification by either diffusion or ion implantation.

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