Thin-film photoelectric conversion device and a method of manufa

Details Thin-film photoelectric conversion device and a method of manufa Thin-film photoelectric conversion device and a method of manufa

1996-03-27

1997-12-23

Weisstuch, Aaron

Batteries: thermoelectric and photoelectric

Photoelectric

Cells

136261, 257 49, 257 75, 437 4, 437 10, 437 11, 437 12, 437109, 437247, 437967, H01L 3104, H01L 310368, H01L 3118

Patent

active

057003335

ABSTRACT:
A method of manufacturing a thin-film solar cell, comprising the steps of: forming an amorphous silicon film on a substrate; placing a metal element that accelerates the crystallization of silicon in contact with the surface of the amorphous silicon film; subjecting the amorphous silicon film to a heat treatment to obtain a crystalline silicon film; depositing a silicon film to which phosphorus has been added in contact with the crystalline silicon film; and subjecting the crystalline silicon film and the silicon film to which phosphorus has been added to a heat treatment to getter the metal element from the crystalline film.

REFERENCES:
patent: 4561171 (1985-12-01), Schlosser
patent: 5085711 (1992-02-01), Iwamoto et al.
patent: 5244819 (1993-09-01), Jue
patent: 5275851 (1994-01-01), Fonash et al.
patent: 5380372 (1995-01-01), Campe et al.
patent: 5426061 (1995-06-01), Sopori

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