Substrate transport apparatus

Details Substrate transport apparatus Substrate transport apparatus

1992-11-18

1994-11-01

Bennet, Henry A.

Drying and gas or vapor contact with solids

Apparatus

For diverse operations on treated material

414292, 134 85, F26B 1900

Patent

active

053597850

ABSTRACT:
A deck movable between cassettes arranged on a base for storing a plurality of substrates in multiple stages and a substrate cleaning section for cleaning the substrates, supports a substrate fetching arm for fetching the substrates from the cassettes, and a cleaned substrate depositing arm for depositing treated substrates. The depositing arm is vertically movable between a position in which a substrate supporting surface thereof is situated below a substrate supporting surface of the substrate fetching arm to render the latter operative, and a position in which the supporting surface of the depositing arm is situated above the supporting surface of the fetching arm to render the depositing arm operative.

REFERENCES:
patent: 4556362 (1985-12-01), Bahnck et al.

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