Method of fabricating buried contacts

Details Method of fabricating buried contacts Method of fabricating buried contacts

1981-04-06

1983-02-15

Ozaki, G.

Metal working

Method of mechanical manufacture

Assembling or joining

29571, 29591, 29576B, 148187, H01L 2126

Patent

active

043732542

ABSTRACT:
A novel method for forming a buried contact wherein the area of the buried contact is preconditioned by being doped to thus preclude the formation of an undesirable junction surrounding the buried contact.

REFERENCES:
patent: 4196443 (1980-04-01), Dingwall
patent: 4225875 (1980-09-01), Ipri
patent: 4232327 (1980-11-01), Hsu
patent: 4236167 (1980-11-01), Woods
patent: 4263057 (1981-04-01), Ipri

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