Testing apparatus for semiconductor device

Details Testing apparatus for semiconductor device Testing apparatus for semiconductor device

1986-09-19

1989-01-31

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Plural, automatically sequential tests

324 73AT, 324 73PC, G01R 1073, G01R 104

Patent

active

048018716

ABSTRACT:
A connection of each of the terminals of a semiconductor device under test (DUT) with a test signal provided from a tester and a connection of each of the above stated terminals with a power supply system in the tester are selected in an arbitrary manner based on the serial data for designating connections provided from the tester.

REFERENCES:
patent: 3496464 (1970-02-01), Janpersley
patent: 4168527 (1979-09-01), Winkler
patent: 4180203 (1979-12-01), Masters
patent: 4275464 (1981-06-01), Schmidt
patent: 4342958 (1982-08-01), Russell
patent: 4635259 (1987-01-01), Shivabeck et al.
patent: 4637020 (1987-01-01), Shivabeck
GR18 Complex VLSI Test System, by GenRad Semiconductor Test Inc., Sep. 1983.
International Test Conference 1987 Proceedings, Sep. 1987.
Mega One VLSI Test System Product Description, by Megatest Corp., 2/20/84, 3 pages.
"Multiple Matrix Switch: A High-Performance Universal Switching System", by Hovacs, 11/30/78, Internat. Auto. Test. Confer., pp. 112-118.

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