Masking element fixture

Details Masking element fixture Masking element fixture

1994-09-30

1998-07-28

Bennett, Henry A.

Heating

Accessory means for holding, shielding or supporting work...

432 5, 432241, F27D 500

Patent

active

057855188

ABSTRACT:
A fixture for holding a plurality of masking elements while the masking elements are being baked to remove impurities is disclosed. The masking elements are used to mask dies used for forming sputtering targets used to deposit thin films on a substrate. The fixture includes a housing having first and second end walls connected between first and second side walls wherein the first and second end and side walls form an interior aperture. In addition, the fixture includes a several slots which are formed in the first and second side walls wherein each of the slots are suitable for holding a single masking element. In particular, the interior aperture is of a sufficient size and the slots are positioned such that suitable air circulation is provided between each of the masking elements to expose the masking elements to a predetermined temperature suitable for removing the impurities from the masking elements. Furthermore, the fixture includes openings formed in the end walls which enable handling of the fixture and provide additional air circulation.

REFERENCES:
patent: 3951587 (1976-04-01), Alliegro et al.
patent: 4228902 (1980-10-01), Schulle

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