Thermally matched mounting substrate

Electricity: conductors and insulators – Boxes and housings – Hermetic sealed envelope type

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Details

29588, 357 74, H01L 2314

Patent

active

046509224

ABSTRACT:
A mounting substrate (10) is formed from a platelet of graphite (22) conformally coated with a layer of silicon carbide (24). A layer of silicon dioxide (25) is disposed thereon and a chip (16) mounted onto the substrate (10). The silicon carbide has a thermal expansion coefficient that is essentially equal to silicon in addition to a high thermal conductivity.

REFERENCES:
patent: 3391016 (1968-07-01), McCrary, Jr. et al.
patent: 3683105 (1972-08-01), Shamash et al.
patent: 4283464 (1981-08-01), Hascoe
patent: 4370421 (1983-01-01), Matsushita et al.
patent: 4517584 (1985-05-01), Matsushita et al.
patent: 4581279 (1986-04-01), Sugishita et al.

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