Optical displacement sensor

Details Optical displacement sensor Optical displacement sensor

1995-04-25

1996-10-29

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250205, 356356, H01J 314

Patent

active

055699138

ABSTRACT:
An apparatus for detecting a displacement of a diffraction grating set on a measured object, comprises a light-emitting device, a separation optical element for separating a beam from the light-emitting device into a plurality of beams, a multiplexing optical element for multiplexing light beams diffracted by the diffraction grating from two beams out of the plurality of beams, a first detecting unit for detecting interference light generated when the beams of diffracted light are multiplexed by the multiplexing optical element and outputting a signal related to relative displacement information to the diffraction grating, and a second detecting unit for outputting a signal related to different information from the relative displacement information to the diffraction grating, based on a change in a diffracted light quantity of diffracted light by the diffraction grating from another beam out of the plurality of beams and/or another diffracted light by the diffraction grating from the two beams.

REFERENCES:
patent: 4176276 (1979-11-01), Kaul et al.
patent: 4998798 (1991-03-01), Ishizuka et al.
patent: 5059791 (1991-10-01), Ishizuka et al.
patent: 5283434 (1994-02-01), Ishizuka et al.
patent: 5390022 (1995-02-01), Ishizuka et al.

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