Method and apparatus of determining optical constants of amorpho

Details Method and apparatus of determining optical constants of amorpho Method and apparatus of determining optical constants of amorpho

1988-07-26

1990-02-27

Lall, Parshotam S.

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356381, G01N 2100

Patent

active

049051709

ABSTRACT:
Disclosed is a method of and apparatus for determining the optical constants of materials in general and also for determining thicknesses of thin films. A complex index of refraction is derived that provides excellent fits to the measured n and k values of a large number of materials (including semiconductors, dielectrics, and metals) over a wide range of photon energies covering almost the entire range of the spectrum of electromagnetic radiation, including infrared, visible and ultraviolet.

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