Method of forming films over insulating material

Details Method of forming films over insulating material Method of forming films over insulating material

1998-02-19

2000-06-27

King, Roy V.

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

4272557, 427122, 427404, 4274197, 427902, C23C 1626

Patent

active

060804459

ABSTRACT:
A method of forming films over an insulating material is provided whereby an underlayer film having electric conductivity is formed on the surface of the insulating material constituting a base member, and a hard carbon film is formed over the underlayer film so that the surface electrical resistance value of the hard carbon film can be controlled so as not to cause the surface thereof to be charged with static electricity by varying an electrical resistance value of the underlayer film. In the case where the underlayer film is formed of a metal film composed of titanium, chromium, tungsten, or the like, the resistance value thereof can be changed by varying the thickness of the metal film. In the case where the underlayer film is formed of a semiconductor film composed of silicon, germanium, or the like, the resistance value thereof can be changed by varying the thickness of the semiconductor film, or the concentration of an impurity added thereto.

REFERENCES:
patent: 4842937 (1989-06-01), Meyer et al.
patent: 5232568 (1993-08-01), Parent et al.

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