Method of making electrostatic chuck with oxide insulator

Details Method of making electrostatic chuck with oxide insulator Method of making electrostatic chuck with oxide insulator

1993-12-20

1996-07-16

Arbes, Carl J.

Metal working

Method of mechanical manufacture

Electrical device making

269 8, 361234, H01R 4300

Patent

active

055355072

ABSTRACT:
An electrostatic chuck is made by a method in which the component parts are machined, then anodized to provide a hard insulating surface, and then assembled in a fixture, to provide a planar surface for wafer support that retains superior insulating properties; gas may be fed from the rim only, diffusing within interstices between the clamping surface and the wafer and maintaining a desired pressure by flowing radially through an impedance determined by the average spacing between clamping surface and wafer, thereby providing uniform pressure across the clamping surface without the use of elastomeric seals.

REFERENCES:
patent: 3993123 (1976-11-01), Chu et al.
patent: 5055964 (1991-10-01), Logan et al.
patent: 5213349 (1993-05-01), Elliott
patent: 5350479 (1994-09-01), Collins et al.
patent: 5384682 (1995-01-01), Watanabe et al.
Makoto S., "Electrostatic Chuck Apparatus", Patent Abstracts of Japan, Application No. JP1251735, E-868, vol. 14 No.2, 0ct. 6, 1989.

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