Method of fabricating a data storage system head slider having a

Details Method of fabricating a data storage system head slider having a Method of fabricating a data storage system head slider having a

1998-10-26

2000-06-27

Hall, Carl E.

Metal working

Piezoelectric device making

2960312, 29424, G11B 542, H01L 4122

Patent

active

060790881

ABSTRACT:
A data storage system head slider and a method of making the same. The head slider includes a slider body and an accelerometer formed integrally with the slider body. In preferred embodiments, the accelerometer includes a cavity-formed in the slider body. A structural beam extends over the cavity such that the structural beam deflects in response to acceleration of the head slider. A piezo transducer formed on the structural beam provides a transducer output signal indicative of a magnitude of the acceleration of the head slider.

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