Fluorinated diamond-like carbon protective coating for magnetic

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427127, 427131, 428336, 428692, 428694, 428900, 428694TF, H01F 1002

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054627842

ABSTRACT:
An improved wear-resistant protective coating for the surfaces of magnetic recording media devices that is formed of fluorinated diamond-like carbon and deposited by a plasma enhanced chemical vapor deposition process or other suitable methods to provide superior friction-reducing and stiction-reducing properties.

REFERENCES:
patent: 4647494 (1987-03-01), Meyerson et al.
patent: 5159508 (1992-10-01), Grill et al.
Micro-Tribological Studies on Fluorinated Carbon Films; S. Miyake, et al.; vol. 113, Apr. 1991; Transactions of the ASME; pp. 384-389.
Fluorohydrogenated amorphous carbon (a-C:H,F) films prepared by the r.f. plasma decomposition of 1,3-butadiene and carbon tetrafluoride; Jayshree Seth and S. V. Babu; Thin Solid Films, 230 (1993) 90-94; pp. 90-94 (no month available).

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