Semiconductor structure for a fiber optical pressure sensing ele

Details Semiconductor structure for a fiber optical pressure sensing ele Semiconductor structure for a fiber optical pressure sensing ele

1981-11-04

1984-09-25

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

357 17, H01L 3300

Patent

active

044737475

ABSTRACT:
The present invention relates to an optical sensor element of a solid material for sensing physical quantities such as pressure, which element is excitable to emit photoluminescence on excitation which constitutes a measure of the quantity being sensed. The sensor element comprises a diaphragm which consists of at least two layers applied to an apertured substrate, at least one of which layers has luminescent properties. The luminescence may be sensed by means of at least one optical fiber.

REFERENCES:
patent: 4273594 (1981-06-01), Heller et al.
patent: 4376890 (1983-03-01), Engstrom et al.
patent: 4378496 (1983-03-01), Brogardh et al.
patent: 4388633 (1983-06-01), Vasudev

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