Polysilane positive photoresist materials and methods for their

Details Polysilane positive photoresist materials and methods for their Polysilane positive photoresist materials and methods for their

1984-04-05

1986-05-13

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

528 25, 528 30, 556430, 430326, C08G 7704

Patent

active

045888019

ABSTRACT:
New polysilane copolymers comprise recurring units of --Si(X)(Y)-- and Si(A)(B)--, Si(X)(Y) being different from Si(A)(B),
wherein

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