Method of an apparatus for a centering of an electron beam

Details Method of an apparatus for a centering of an electron beam Method of an apparatus for a centering of an electron beam

1991-11-21

1993-07-20

Albritton, C. L.

Electric heating

Metal heating

By arc

21912123, B23K 1500

Patent

active

052295702

ABSTRACT:
During the guiding and centering of an electron beam by means of a magnet field arranged orthogonally to the axis of the electron beam in a vacuum coating plant the signals which are decisive regarding the configuration and control of the magnet field or its axis of rotation, resp., are supplied by a detecting of the burning spot of the electron beam on the surface of the evaporation source by means of a video system, i.e. by means of a video camera resp. and a corresponding picture evaluated.

REFERENCES:
patent: 5001403 (1991-03-01), Friedel et al.

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