Thin film transistor

Details Thin film transistor Thin film transistor

1988-01-20

1989-07-18

Edlow, Martin H.

357 4, 357 2, 357 61, H01L 2978

Patent

active

048497975

ABSTRACT:
In a thin film transistor which has an active layer formed between source and drain electrodes, a gate insulating film formed in contact with the active layer, and a gate electrode formed in contact with the gate insulating film, the photoconductivity of the active layer is reduced by forming the active layer of amorphous silicon carbide (a-Si.sub.1-x C.sub.x) whose carbon content x is greater than 0.1.

REFERENCES:
patent: 3600218 (1971-08-01), Pennibaker
patent: 4642144 (1987-02-01), Tiedje

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