Method and apparatus for doping silicon spheres

Details Method and apparatus for doping silicon spheres Method and apparatus for doping silicon spheres

1991-10-29

1993-06-29

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437160, 437168, 437169, H01L 21223

Patent

active

052234525

ABSTRACT:
A method and apparatus for doping silicon spheres (48) with a solid phosphorous source (41, 42) is disclosed. Two solid sheets (41, 42) of solid phosphorous source are held in a chamber (32) and aligned substantially parallel to one another for holding the plurality of silicon spheres therebetween. The chamber (32) temperature is increased to vaporize the sheets (41 and 42) to evenly diffuse phosphorous vapor into the silicon spheres (48).

REFERENCES:
patent: 3986905 (1976-10-01), Garavaglia
patent: 3998659 (1976-12-01), Wakefield
patent: 4661177 (1987-04-01), Powell
patent: 4789596 (1988-12-01), Allen et al.

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