Cryopump water drain

Details Cryopump water drain Cryopump water drain

1992-04-16

1993-07-20

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 417901, B01D 800

Patent

active

052282996

ABSTRACT:
A cryopump includes a sloped draining surface for receiving liquids released from cyropumping surfaces. The liquids are collected in an exhaust port and released outside the cryopump vacuum vessel. A pressure relief valve coupled to the exhaust port exhausts gases released by the pumping surfaces after warming. The cryopump further includes a drain filter assembly connected to the exhaust port for collecting debris and removing liquid that is released from the cryopumping surfaces. A purge gas tube facilitates the removal of large quantities of liquid in the cryopump.

REFERENCES:
patent: 4655046 (1987-04-01), Eacobacci et al.
patent: 4718240 (1988-01-01), Andeen et al.
patent: 4724677 (1988-02-01), Foster
patent: 4834136 (1989-05-01), Bourke et al.

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