Reagent source for molecular beam epitaxy

Details Reagent source for molecular beam epitaxy Reagent source for molecular beam epitaxy

1988-04-07

1992-06-16

Lusignan, Michael

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

118715, 118726, 156611, 156DIG103, C23C 1600

Patent

active

051223937

ABSTRACT:
A source assembly adapted to provide one or more metal organic compounds into an MBE reaction chamber wherein the source assembly comprises a mixer manifold which has one or more inlet connectors for providing the metal organic compounds. Each inlet connector includes a resistance valve for defining a flow rate of vapour of the metal organic compound under a pre-set pressure gradient and an on/off valve for selecting the operational status of the source. Preferably the mixer manifold acts as a collimator which avoids the need to fit a rotating substrate.

REFERENCES:
patent: 4393013 (1983-07-01), McMenamin
patent: 4545801 (1985-10-01), Miyajiri et al.
patent: 4550411 (1985-10-01), Stonestreet et al.
patent: 4636268 (1987-01-01), Tsang
patent: 4699085 (1987-10-01), Purdes
patent: 4704988 (1987-11-01), Mellet
patent: 4774416 (1988-09-01), Askary et al.

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