Method of producing an X-ray mirror by spin coating an intermedi

Details Method of producing an X-ray mirror by spin coating an intermedi Method of producing an X-ray mirror by spin coating an intermedi

1991-05-20

1992-06-16

Beck, Shrive

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 65, 427160, 427240, 427355, 427404, 359838, 359884, 359885, 378 70, B05D 306

Patent

active

051223880

ABSTRACT:
An X-ray mirror having its layer structure in the sequence of: a substrate having the surface roughness (R.sub.max) of 1,000 .ANG. or below; an intermediate layer of high molecular weight material formed on this substrate and having a surface roughness (R.sub.max) of 100 .ANG. or below; and a thin film formed on this intermediate layer, the X-ray mirror being produced by the process steps of: providing a substrate having a surface roughness (R.sub.max) of 1,000 .ANG. or below; forming on this substrate an intermediate layer of a high molecular weight material by spin-coating with a surface roughness (R.sub.max) of 100 .ANG. or below; and finally forming a thin film on this intermediate layer.

REFERENCES:
patent: 4684565 (1987-08-01), Abeles et al.
patent: 4693933 (1987-08-01), Keem et al.
patent: 4727000 (1988-02-01), Ovshinsky et al.
patent: 4741926 (1988-05-01), White et al.
patent: 4814232 (1989-03-01), Bluege et al.
patent: 4940319 (1990-07-01), Uedo et al.

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