Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1991-09-25
1993-11-02
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Diaphragm
29 7541, 73718, 3612834, G01L 708, G01L 912
Patent
active
052575420
ABSTRACT:
A sensor for a capacitance pressure gauge having a diaphragm and a base is formed with a series of thin metallic electrode sections formed on the inside of the diaphragm and base. Electrical connection is made to the base electrode sections through the base and one or two pairs of series connected capacitances are formed with the diaphragm electrodes. No direct electrical connection needs to be made to the diaphragm.
REFERENCES:
patent: 4422335 (1983-12-01), Ohnesorge et al.
patent: 4711130 (1987-12-01), Glas et al.
patent: 4864463 (1989-09-01), Shkedi et al.
patent: 5001595 (1991-03-01), Dittrich et al.
patent: 5050034 (1991-09-01), Hegner et al.
Elektrisch Druckmessung, Schaltungen zur kapazitiven Druckmessun by Otto Muller, date Jan. 1940.
Leybold Aktiengesellschaft
Woodiel Donald O.
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