Spatial light modulator having improved contrast ratio

Details Spatial light modulator having improved contrast ratio Spatial light modulator having improved contrast ratio

1999-07-16

2000-03-14

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359224, 359226, 359850, G02B 2600

Patent

active

06038056&

ABSTRACT:
A spatial light modulator (70) comprised of an array of micromirrors (72) each having support post (74). The support post (74) defines support post edges (76) in the upper surface of the mirrors (72). These support post edges (76) are all oriented at 45 degree angles with respect to an incident beam of light from a light source (80) to minimize diffraction of light from the edges (76) into the darkfield optics when the mirrors are oriented in the off-state. The present invention achieves an increased contrast ratio of about 20% over conventional designs.

REFERENCES:
patent: 5061049 (1991-10-01), Hornbeck
patent: 5142405 (1992-08-01), Hornbeck
patent: 5535047 (1996-07-01), Hornbeck
patent: 5583688 (1996-12-01), Hornbeck
patent: 5661591 (1997-08-01), Lin et al.
patent: 5771116 (1998-06-01), Miller et al.
patent: 5943157 (1999-08-01), Florence et al.
patent: 5953153 (1999-09-01), Conner et al.

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