Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1986-04-16
1988-09-20
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
250310, G01R 1900, G01R 3102
Patent
active
047728477
ABSTRACT:
A stroboscopic type potential measurement device is disclosed, in which a waveform of a periodically varying voltage at a location irradiated with a charged particle pulsed beam is measured by using the charged particle pulsed beam synchronized with a periodically varying voltage in a sample and varying the relation in the phase between the periodically varying voltage in the sample and the charged particle pulsed beam. In order to reproduce a potential waveform, which is close to the original waveform, two sorts of measurements having different phase division pitches are effected and a measurement result is formed by combining a measurement result obtained by using a coarse phase division and that obtained by using a fine phase division. A phase scanning with the coarse phase division pitch is repeated for every fine phase division pitch.
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Burns W.
Eisenzopf Reinhard J.
Hitachi , Ltd.
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