Ultrasonic microscope

Measuring and testing – Vibration – By mechanical waves

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Details

73620, G01N 2906, G01N 2926

Patent

active

051216345

ABSTRACT:
An ultrasonic microscope comprises an acoustic lens for emitting an ultrasonic beam, a movable shaft for supporting a sample, and a drive circuit for moving the movable shaft and thus the sample relative to the acoustic lens in a z-direction. Two signals for eliminating x-direction and y-direction inclinations of the sample relative to the acoustic lens are supplied to the drive circuit in synchronism with an x-direction drive signal and a y-direction drive signal, so that the sample is moved in the z-direction and scanned with the ultrasonic beam in an x-y direction while the sample inclination sample to the acoustic lens is being eliminated.

REFERENCES:
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patent: 4541281 (1985-09-01), Chubachi et al.
patent: 4655083 (1987-04-01), Chubachi
patent: 4683751 (1987-08-01), Imade et al.
patent: 4920803 (1990-05-01), Karaki et al.
patent: 4977544 (1990-12-01), Karaki et al.
patent: 4977779 (1990-12-01), Karaki et al.

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