Semiconductor accelerometer

Details Semiconductor accelerometer Semiconductor accelerometer

1988-12-16

1992-06-16

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

338 46, G01P 1508

Patent

active

051216337

ABSTRACT:
A semiconductor accelerometer including a weight, a support frame surrounding the weight with a gap therebetween, at least one beam for connecting the weight to the support frame, a piezoresistor attached onto the beam for detecting acceleration, and stoppers for restricting the movement of the weight relative to the support frame, in which at least one first projection integrally mounted to the weight and at least one second projection integrally mounted to the support frame cooperate to function as the stoppers. At least one first cross member and at least one second cross member may cooperate with the first and second projections. First and second stopping members may also cooperate with the first and second projections.

REFERENCES:
patent: 4829822 (1989-05-01), Imai et al.
patent: 4882933 (1989-11-01), Petersen et al.
patent: 4891985 (1990-01-01), Glenn
patent: 4901570 (1990-02-01), Chang et al.
Barth, P. W. et al., A monolithic Silicon Accelerometer with Integral Air Damping and Overrange Protection, THO 215-4/88/0000 pp. 35-38, 1988.
L. Roylance, "IEEE Transactions on Electron Devices", A Batch-Fabricated Silicon Accelerometer, vol. ED-26, No. 12, Dec. 1979, pp. 1911-1917.

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