High speed semiconductor characterization technique

Details High speed semiconductor characterization technique High speed semiconductor characterization technique

1988-06-01

1989-10-17

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

2504922, 324158R, G01R 3126, G01R 3128

Patent

active

048750042

ABSTRACT:
The invention provides a test system and method using E-Beam techniques to characterize LSI photodiode arrays in both their electrical and optical properties.

REFERENCES:
patent: 4695794 (1987-09-01), Bargett et al.
patent: 4730158 (1988-03-01), Kasai et al.
Rosbeck et al.; "Background and Temperature . . . "; J. Appl. Phys.; 53(9); ep. 1982; pp. 6430-6440.

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