Encapsulation for high frequency semiconductor device

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357 80, 357 74, H01L 3902, H01L 2302

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active

039745180

ABSTRACT:
An hermetic sealed microwave diode package having high thermal conductivity and very low parasitic impedances. The diode chip is mounted upon a diamond member embedded in a copper base member so that the diamond mounting surface and the copper base member surface are coplanar. A fused silica insulator ring produced by selective grit blasting surrounds the chip and is mounted likewise entirely on the diamond surface. The silica insulator has a height comparable to the thickness of the semiconductor chip and the enclosure is completed by a metal covering member which includes a contact to the top surface of the diode chip. The package thereby has extremely short conductive paths and low capacitance by virtue of the very small silica insulator ring.

REFERENCES:
patent: 3515952 (1970-06-01), Robinson
patent: 3710202 (1973-01-01), Leidich et al.
Proceeding IEEE - 8/72 - pp. 1014-1015, "Embedded Diamond Heat Sinks . . . ".

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