Arrangement for optically measuring a distance between a surface

Details Arrangement for optically measuring a distance between a surface Arrangement for optically measuring a distance between a surface

1989-01-17

1989-10-17

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

G01B 1124

Patent

active

048742465

ABSTRACT:
An optical distance or profile meter in which radiation reflected from a surface (630) is projected onto a radiation-sensitive dectection system via an optical system (641, 642) comprises a radiation-blocking plate (250) formed with radiation windows (651). The radiation-blocking plate only transmit radiation which is reflected from the surface at an angle relative to the optical axis of the optical system. The extent of the pattern of radiation spots thus formed on the detection system is a measure of the distance (.DELTA.h) from the surface. The detection system may comprise a semitransparent filter(660) whose transmission coefficient exhibits a position-dependent variation. This enables the radiation-sensitive element to be constructed as a single element (661) and the effects of speckle noise to be reduced substantially.

REFERENCES:
patent: 3606541 (1971-09-01), Sugano et al.
patent: 4548504 (1985-10-01), Morander
patent: 4595271 (1986-06-01), Suda et al.
patent: 4645347 (1987-02-01), Rioux
patent: 4677302 (1987-06-01), Chui et al.

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