Optical system for rapid inspection of via location

Details Optical system for rapid inspection of via location Optical system for rapid inspection of via location

1992-12-04

1994-02-22

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

25022728, G02B 604, G02B 2700

Patent

active

052889912

ABSTRACT:
An inspection system in which the surface of a substrate is continuously scanned by a linear CCD. The surface is illuminated in a narrowly focused strip from a broad-band light source that is selectively wavelength filtered to optimize image contrast to the optical characteristics of the surface under inspection. A channel integrator in the light source optical system provides illumination homogeneity at the surface of the substrate.

REFERENCES:
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patent: 4222630 (1980-09-01), Delignieres
patent: 4787013 (1988-11-01), Sugino et al.
patent: 4812614 (1989-03-01), Wang et al.
patent: 4939630 (1990-07-01), Kikuchi et al.
patent: 4952022 (1990-08-01), Genovese
patent: 4974927 (1990-12-01), Kimura
patent: 5109459 (1992-04-01), Eibert et al.
patent: 5117245 (1992-05-01), Gordon

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