Method of evaluating performance of a scan-type exposure apparat

Details Method of evaluating performance of a scan-type exposure apparat Method of evaluating performance of a scan-type exposure apparat

1998-11-13

2000-11-28

Adams, Russell

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, G03B 2742, G03B 2754

Patent

active

061542695

ABSTRACT:
In a scan type exposure apparatus which provides relative movement between an exposure beam and an object in a predetermined direction to expose the object, performance of the apparatus is evaluated by a method that comprises detecting the exposure beam under an operation condition to be used in a scan exposure for the object, and evaluating the performance of the apparatus based on information obtained by detecting the exposure beam. The operation condition may be one that causes unevenness in the integrated exposure amount for the object to be exposed or movement speed of a movable member holding the object. The detecting may involve the detection of exposure beam pulses.

REFERENCES:
patent: Re32795 (1988-12-01), Matsurra
patent: 4465368 (1984-08-01), Matsuura et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5191374 (1993-03-01), Hazama et al.
patent: 5255051 (1993-10-01), Allen
patent: 5473410 (1995-12-01), Nishi
patent: 5473412 (1995-12-01), Ozawa
patent: 5477304 (1995-12-01), Nishi
patent: 5483311 (1996-01-01), Sakakibara et al.
patent: 5608492 (1997-03-01), Sato
patent: 5663784 (1997-09-01), Tanimoto
patent: 5777724 (1998-07-01), Suzuki
patent: 5898480 (1999-04-01), Ozawa
patent: 5914773 (1999-06-01), Kurosawa et al.
patent: 5929977 (1999-07-01), Ozawa

Affiliated with

Also associated with

Rating

Method of evaluating performance of a scan-type exposure apparat does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of evaluating performance of a scan-type exposure apparat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of evaluating performance of a scan-type exposure apparat will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1731241