Thin-film transistor having a plurality of island-like regions

Details Thin-film transistor having a plurality of island-like regions Thin-film transistor having a plurality of island-like regions

1996-03-28

1998-06-16

Loke, Steven H.

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Field effect device in non-single crystal, or...

257 72, 257347, H01L 2976, H01L 2904, H01L 2701

Patent

active

057675295

ABSTRACT:
A thin-film transistor comprising an active silicon pattern which is formed of a plurality of island-like regions arranged in parallel to each other, the island-like regions being formed of a polycrystal silicon thin film and each having a plane area of 1000 .mu.m.sup.2 or less.

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