Fine particle collector arrangement for vacuum pumps

Details Fine particle collector arrangement for vacuum pumps Fine particle collector arrangement for vacuum pumps

1988-01-27

1989-05-23

Hart, Charles

Gas separation

Means within gas stream for conducting concentrate to collector

55 80, 55269, B01D 500

Patent

active

048327158

ABSTRACT:
The present invention relates to a fine particle collector arrangement for vacuum pumps, in which high temperature walls and low temperature walls are alternately provided in the collecting chamber to form gas flow passage which is extended from the inlet conduit connected with the vacuum processing chamber to the outlet conduit connected with the vacuum pump, and the gas flow passage has larger cross section than that of the inlet conduit. Fine particles in gas flowing from the inlet conduit are deposited on the each low temperature wall member to be efficiently collected by the thermal creep velocity caused by the thermophoretic force.

REFERENCES:
patent: 2833370 (1958-05-01), Sherwood
patent: 3411270 (1968-11-01), Cornelius et al.
patent: 4391617 (1983-07-01), Way
patent: 4497641 (1985-02-01), Brown et al.
patent: 4515629 (1985-05-01), Dizek et al.
patent: 4675031 (1987-06-01), Sinnar

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