Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

1992-08-28

1993-08-10

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313A, H01L 4108

Patent

active

052352366

ABSTRACT:
Disclosed herein is a surface acoustic wave device whose characteristics can be stably maintained against temperature changes. The surface acoustic wave device has an insulating diamond layer (2), which is provided thereon with a part (3) defined by a pair of interdigital electrodes (7, 7') and a piezoelectric layer (8), and a thermistor (4) made of semi-conductive diamond. The thermistor (4) quickly detects the temperature of the device.

REFERENCES:
patent: 4518944 (1985-05-01), Faris
patent: 4952832 (1990-08-01), Imai et al.
patent: 5045355 (1991-09-01), Spiro et al.
patent: 5152930 (1992-10-01), Spiro et al.
patent: 5160869 (1992-11-01), Nakahata et al.

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