Linear electrostatic actuator with means for concatenation

Details Linear electrostatic actuator with means for concatenation Linear electrostatic actuator with means for concatenation

1990-08-31

1993-08-10

Skudy, R.

Electrical generator or motor structure

Dynamoelectric

Linear

310 17, 310 22, 310309, 318135, H02K 4100

Patent

active

052352250

ABSTRACT:
Miniaturized linear electrostatic motor comprising a plurality of parallel stators and a flexible rotor disposed between adjacent stators. The stators may be fabricated by depositing a plurality of conductive electrodes on each facing surface of the stator or the electrodes may alternatively be placed on the flexible rotor element. The electrodes are selectively energized by a commutating circuit in a manner to effect movement of the rotor relative to the stator in a perpendicular to parallel motion. The electrostatic motor is particularly suitable for fabrication using photo-lithographic techniques and the formation of multi-layered, concatenated motor structures.

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