Electric heating – Metal heating – By arc
Patent
1992-04-28
1993-08-10
Albritton, C. L.
Electric heating
Metal heating
By arc
21912168, 338195, B23K 2600
Patent
active
052351548
ABSTRACT:
Disbonded two-level (bimetal) metal interconnections are removed by first vaporizing metal in the lower level that is exposed by the narrower metal on the upper level using a pulsed laser beam having an energy density above a vaporization threshold in a first beam width and then vaporizing the remaining portion of the metal in both levels using the laser beam with a narrower beam width that covers only the narrower width of the upper level metal.
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Albritton C. L.
International Business Machines - Corporation
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