Sensor comprising multilayer substrate

Details Sensor comprising multilayer substrate Sensor comprising multilayer substrate

1995-10-30

1997-05-20

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

3612833, G01P 15125, H01G 700

Patent

active

056314221

ABSTRACT:
A sensor includes a first silicon layer, and a sensor element including at least one electrode structured from the first silicon layer. The sensor also includes at least one connecting element also structured from the first silicon layer. The connecting element has a doping less than the doping of the electrode. The sensor comprises at least one conductor track on the first silicon layer routed over the connecting element and coupled to the sensor element for supplying an external signal.

REFERENCES:
patent: 5337606 (1994-08-01), Bennett et al.
patent: 5345824 (1994-09-01), Sherman et al.
patent: 5417111 (1995-05-01), Sherman et al.
patent: 5495761 (1996-03-01), Diem et al.

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