Small cell, low contact assistance rugged power field effect dev

Details Small cell, low contact assistance rugged power field effect dev Small cell, low contact assistance rugged power field effect dev

1992-02-03

1993-08-10

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 49, 257 24, H01L 21265

Patent

active

052348512

ABSTRACT:
A multi-cellular power field effect semiconductor device has compact cells including a heavily doped portion of a body region which is self-aligned with respect to an aperture in the gate electrode. The intercept of this heavily doped portion of the body region with the upper surface of the device may also be self-aligned with respect to the aperture and the gate electrode. A method of producing the device is also disclosed.

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