Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1982-02-10
1983-09-13
Rutledge, L. Dewayne
Metal working
Method of mechanical manufacture
Assembling or joining
29576E, 29578, 148 15, 148191, H01L 2174
Patent
active
044034008
ABSTRACT:
In a process for producing a semiconductor device, buried regions are formed within the semiconductor substrate by introducing an impurity, an epitaxial layer is formed on the buried regions, and an energy beam is selectively irradiated on the surface of the epitaxial layer.
REFERENCES:
patent: 4170501 (1979-10-01), Khajezadeh
Joshi, M. L., et al., "Masking Technique for Laser Induced Diffusion", in IBM-TDB, vol. 13, No. 4, Sep. 1970, p. 928.
Fujitsu Limited
Rutledge L. Dewayne
Schiavelli Alan E.
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