Process for producing a semiconductor device

Metal working – Method of mechanical manufacture – Assembling or joining

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29576E, 29578, 148 15, 148191, H01L 2174

Patent

active

044034008

ABSTRACT:
In a process for producing a semiconductor device, buried regions are formed within the semiconductor substrate by introducing an impurity, an epitaxial layer is formed on the buried regions, and an energy beam is selectively irradiated on the surface of the epitaxial layer.

REFERENCES:
patent: 4170501 (1979-10-01), Khajezadeh
Joshi, M. L., et al., "Masking Technique for Laser Induced Diffusion", in IBM-TDB, vol. 13, No. 4, Sep. 1970, p. 928.

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