Structure for protecting thin dielectrics during processing

Fishing – trapping – and vermin destroying

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357 59, 437967, 361 91, H01L 2176

Patent

active

049410288

ABSTRACT:
A structure used to protect a dielectric is disclosed wherein a transistor located nearby the dielectric is connected in series with a conductor overlying the fragile dielectric such that the transistor gate will accumulate charge along with the conductive material over the fragile dielectric. After fabrication and during normal circuit operation, this transistor device remains in an off state, isolating the fragile dielectric node from other circuitry. In an alternate embodiment the protection transistor is a floating gate depletion device, which would always be on until the circuit is activated. At the time the circuit is activated, the device is turned off by trapping electrons on the gate by avalancing a junction associated with it. In a preferred, embodiment, a buried contact is formed after the conductor overlying the dielectric, usually polysilicon, is formed. This buried contact connects the conductor to the discharging transistor. Alternatively, a weak portion in the dielectric may be deliberately created by placing a lightly doped N-type diffusion in the area under which the buried contact is desired.

REFERENCES:
patent: 4543597 (1985-09-01), Shibata
patent: 4786956 (1988-11-01), Puar

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