Polybenzoxazole and polybenzothiazole precursors

Details Polybenzoxazole and polybenzothiazole precursors Polybenzoxazole and polybenzothiazole precursors

1998-09-25

2000-11-28

Baxter, Janet

Radiation imagery chemistry: process, composition, or product th

Diazo reproduction, process, composition, or product

Composition or product which contains radiation sensitive...

430146, 430149, 528327, 528360, 528367, 528373, G03C 152, C08G 6900

Patent

active

061533505

ABSTRACT:
The polybenzoxazole and polybenzothiazole precursors of the invention have the following partial structure: ##STR1## where: A.sup.1 to A.sup.6 are--independently of one another--H, F, CH.sub.3, CF.sub.3, OCH.sub.3, OCF.sub.3, CH.sub.2 CH.sub.3, CF.sub.2 CF.sub.3, OCH.sub.2 CH.sub.3 or OCF.sub.3 CF.sub.3 ;

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patent: 5194562 (1993-03-01), Inbasekaran et al.
"Polymers in Microeletronics--Fundamentals and Applications", Soane et al., Elsevier Science Publishers B.V., Amsterdam, 1989, pp. 189-191.

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