Radiation-sensitive compositions using novolak resins made from

Details Radiation-sensitive compositions using novolak resins made from Radiation-sensitive compositions using novolak resins made from

1991-11-04

1994-04-26

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Diazo reproduction, process, composition, or product

Composition or product which contains radiation sensitive...

430191, 430192, 430193, 430326, G03F 7023, G03F 730

Patent

active

053065948

ABSTRACT:
A novolak resin composition comprising at least one unit of the reaction product of a para-, para-bonded bisphenol having formula (A): ##STR1## wherein R.sub.1 =hydrogen, lower alkyl group having 1-4 carbon atoms, halogen, or lower alkoxy group having 1-4 carbon atoms;

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Honda et al. "Studies of Dissolution Inhibition Mechanism of DNQ-Novolak Resist (II) Effect of Extended Ortho-Ortho Bond in Novolak", SPIE vol. 1466 Advances in Resist Technology & Processing VIII (1991), p. 141 et seq.

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