Semiconductor device with an insulation groove

Details Semiconductor device with an insulation groove Semiconductor device with an insulation groove

1995-06-06

1997-03-18

Brown, Peter Toby

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

257759, 257760, H01L 23522, H01L 23532

Patent

active

056125720

ABSTRACT:
A semiconductor device comprising a semiconductor substrate, an insulation structure formed on the substrate and including a groove extending along a top surface of the insulation structure, and a wiring film formed lengthwise on the groove of the insulation film.

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"New Method of Making A1 Single Crystal Interconnections on Amorphous Insulators"; J. Wada, K. Suguro, N. Hayasaka and H. Okano, 31st Annunal Proceedings of Reliability Physics 1993, Atlanta, Georgia, Mar. 23-25, 1993, pp. 71-76.

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