Fishing – trapping – and vermin destroying
Patent
1995-09-29
1997-03-18
Niebling, John
Fishing, trapping, and vermin destroying
437195, 437957, 437978, 437981, 437982, H01L 2128
Patent
active
056122527
ABSTRACT:
A new method of metallization using a new design of metal contact shape, contact/via profile, and metal lines having considerably reduced current density and improved electromigration of metal lines is achieved. Metal contacts are formed in a rectangular shape instead of a square shape with the wider side perpendicular to the current direction. Contact openings are made having concavo-concave profiles which can provide a wider conducting cross-sectional area than can conventional openings with a vertical profile near the contact bottom. Gaps are formed within wide and high current metal lines so that current density can be effectively lowered by utilizing the whole metal line uniformly.
REFERENCES:
patent: 4812419 (1989-03-01), Lee et al.
patent: 4952528 (1990-08-01), Abe et al.
patent: 5041397 (1991-08-01), Kim et al.
patent: 5119170 (1992-06-01), Iwamatsu
patent: 5233224 (1993-08-01), Ikeda et al.
patent: 5364817 (1994-11-01), Lur et al.
patent: 5368682 (1994-11-01), Park
IBM Tech. Disc. Bull., "Method for Producing Metal Wires with locally varying Diameter", vol. 38, No. 7, Jul. 1995, p. 73.
Lur Water
Wu Jiun Y.
Bilodeau Thomas G.
Niebling John
United Microelectronics Corporation
Wright William H.
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