Method of producing photovoltaic device

Details Method of producing photovoltaic device Method of producing photovoltaic device

1995-05-24

1997-03-18

Weisstuch, Aaron

Fishing, trapping, and vermin destroying

136256, 136258, 136259, 20419229, 257436, 257458, 437 2, 437181, 437189, H01L 3118, H01L 3120

Patent

active

056122292

ABSTRACT:
There is provided a method and apparatus for producing a photovoltaic device which is excellent in conversion efficiency and economical efficiency of mass production. Such a photovoltaic device is produced by forming a first metal oxide film on a metal member by non-reactive sputtering, forming a second metal oxide film on the first metal oxide film by reactive sputtering, and forming a semiconductor on the second metal oxide film.

REFERENCES:
patent: 4419533 (1983-12-01), Czubatyj et al.
patent: 4842705 (1989-06-01), Mueller
patent: 5230746 (1993-07-01), Wiedeman et al.

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