Semiconductor device with low inductance of wirings connecting i

Details Semiconductor device with low inductance of wirings connecting i Semiconductor device with low inductance of wirings connecting i

1990-05-29

1991-09-24

Wojciechowicz, Edward J.

357 237, 357 43, 357 46, H01L 2702

Patent

active

050518089

ABSTRACT:
A semiconductor device having the function of a conductivity-modulation type MOSFET with improved switching speed is disclosed, which device has low inductance of wirings connecting individual elements of the device. The elements forming the semiconductor device are connected by short, deposited wirings in the silicon substrate or on the silicon substrate, thereby minimizing the inductance of the wiring.

REFERENCES:
patent: 4901124 (1990-02-01), Seki

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