Scanning exposure apparatus having a modulation signal adjusting

Optical: systems and elements – Deflection using a moving element

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Details

359246, 358417, 358474, G02B 2608, H04N 104

Patent

active

051345129

ABSTRACT:
A scan-exposure apparatus comprises a detector for detecting the values of the digital modulation signal in adjacent time series and the differences of the values therebetween and an exposure time changing device for compensating the time spans of the modulation signal. The detector detects the values of the digital modulation signal in two adjacent units of the time series and the difference between the values. An exposure time compensation device adjusts time spans of the time series of the modulation signal. Thus, the modulation signal pattern is rendered similar to the exposure of the exposure beam.

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