Ion-plating apparatus having an h.f. electrode for providing an

Details Ion-plating apparatus having an h.f. electrode for providing an Ion-plating apparatus having an h.f. electrode for providing an

1974-03-01

1976-06-15

Kaplan, Morris

Coating apparatus

With cutting, punching or tearing of work

Web or sheet work

C23C 1312

Patent

active

039629880

ABSTRACT:
Apparatus for coating a substrate with a material comprises means for providing an h.f. glow discharge region adjacent to a source for the material. The h.f. glow discharge ionizes the particles of the material of the source evaporated therefrom, instead of a conventional d.c. discharge produced by a d.c. electric field provided between the source and substrate. The h.f. glow discharge region providing means may comprise an h.f. electrode disposed in a gas-filled space of the apparatus between the evaporation source and the substrate and means for applying an h.f. electric voltage between the h.f. electrode and the evaporation source.

REFERENCES:
patent: 3069286 (1962-12-01), Hall
patent: 3318790 (1967-05-01), Carbajal et al.
patent: 3329601 (1967-07-01), Mattox
patent: 3371649 (1968-03-01), Gowen
patent: 3394066 (1968-07-01), Miles
patent: 3594238 (1971-07-01), Hoeckelman
patent: 3847114 (1974-11-01), Kiyozumi

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