Method for cleaning closed spaces with ultraviolet rays

Details Method for cleaning closed spaces with ultraviolet rays Method for cleaning closed spaces with ultraviolet rays

1991-10-29

1993-07-06

Morris, Theodore

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 42, 55102, 55131, 55 6, 55279, 422 24, B08B 312

Patent

active

052250008

ABSTRACT:
Cleaning a closed space such as safety cabinets, clean boxes, safes and wafer storage spaces are performed by irradiating a photoelectron emitting member with ultraviolet rays and/or other forms of radiation to emit photoelectrons into the closed space, electrically charging the fine particles in the closed space with the emitted photoelectrons, and removing the charged fine particles from the closed space.

REFERENCES:
patent: 4750917 (1988-06-01), Fujii
patent: 5060805 (1991-10-01), Fujii et al.
Sakamoto et al., Charging of Aerosol Particles by use of UV Irradiation, Man and His Ecosystem*, vol. 3 *(reprinted from) pp. 735-740, Elsevier, 1989.

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