Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1998-06-23
2000-02-08
Rutledge, D.
Photocopying
Projection printing and copying cameras
Step and repeat
355 67, 355 71, 355 532, 250548, 356400, G03B 2742
Patent
active
060233214
ABSTRACT:
A projection exposure apparatus includes a projection optical system which projects an image of a pattern formed on a mask on a substrate. The projection optical system has a first optical system for forming an intermediate image of the pattern, a first mirror disposed near the intermediate image for deflecting a light beam from the first optical system, and a second optical system for condensing the light beam from the first mirror and forming the image of the pattern on the substrate. The first optical system and the second optical system are subject to an aberration correction with respect to a first wavelength for exposure. A second mirror is disposed near the first mirror and corrects at least a portion of a chromatic aberration generated in the first optical system and the second optical system with respect to a second wavelength different from the first wavelength. A detecting system detects a positional relationship between a mark of the mask and a mark of the substrate with a light beam at the second wavelength through the first optical system, the second optical system, and the second mirror.
REFERENCES:
patent: 4711567 (1987-12-01), Tanimoto
patent: 4739373 (1988-04-01), Nishi
Nikon Corporation
Rutledge D.
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